Dual-Junction LDD/HDD MOSFET Scaling

TCAD-based transistor scaling from 1μm to 0.18μm

Course: EE620 - Physics of Transistors

Instructor: Prof. Souvik Mohapatra

Duration: Mar - Apr 2025

  • Scaled transistor from 1μm to 0.18μm gate length with halo implants for short-channel effect control
  • Achieved Vₜₕ reduction from 1V to 0.85V and 100× Iₒₙ improvement, optimizing through TCAD simulations
  • Used Hurkx BTBT tunneling and mobility degradation models to demonstrate DIBL control at 118 mV/V